Ion Beam Induced Current (IBIC)
Example of IBIC Analysis carried out on a micro-dosimeter device:
To function as an effective micro-dosimeter the device must possess an accurately defined charge collection volume. To measure characteristics of the charge collection of a 10 µm thick device 20 MeV carbon beam was used. Result shows that the magnitude of the charge collection decreases as the ion locations moves further from the n+ region. The distribution is related to the distribution of charge deposited in the Si on Insulator layer see Figures 2a and 2b.
Figure: Schematic drawing of micro-dosimeter
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| Figure: Intensity maps showing a charge collection efficiency - the efficiency decreases as the ion location moves further from the n+ region | Figure: Charge collection efficiency of a single device - warmer color indicates higher efficiency |
