Ion Beam Induced Current (IBIC)


To function as an effective micro-dosimeter the device must possess an accurately defined charge collection volume.

To measure characteristics of the charge collection of a 10 µm thick device 20 MeV carbon beam was used. Result shows that the magnitude of the charge collection decreases as the ion locations moves further from the n+ region. The distribution is related to the distribution of charge deposited in the Si on Insulator layer see Figures 2a and 2b.


Figure 1: Schematic drawing of micro-dosimeter


Figure 2: Intensity maps showing a charge collection efficiency- the efficiency decreases as the ion location moves further from n+ region


Figure 3: Charge collection efficiency of a single device- warmer color indicates higher efficiency