Ion Beam Induced Current (IBIC)
To function as an effective micro-dosimeter the device must possess an accurately defined charge collection volume.
To measure characteristics of the charge collection of a 10 µm thick device 20 MeV carbon beam was used. Result shows that the magnitude of the charge collection decreases as the ion locations moves further from the n+ region. The distribution is related to the distribution of charge deposited in the Si on Insulator layer see Figures 2a and 2b.